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| The EVOLUTION Wafer Automation Product Line | ||||||||||||
EVOLUTION II Wafer Automation is especially developed for the use of “inline” production control. It is corresponding to the clean room step 10. It has the following highlights: Fully automated, integrated image analysis software for defectrecognition and mapping. High performance acoustic scanning system with linear motion scanner, motorized z and acoustic auto focus. 20 mm high speed robot for wafer handling up to 200 mm. Fully automated wafer chuck for wafer handling in water. Up to 3 cassette load stations, drying unit. Bar code reader and pre-aligner. SECS interface for wafer fab communication. |
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| EVOLUTION II Wafer Automation Scanning Acoustic Microscope |
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