| Customized automated solutions for inline process diagnostic and control | |||||||||||||||||||
 inline inspection from 2" - 12" Clean room compatibility down to class 10 Integrated data analysis and automation software, fab communication by SECS interface
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| Wafer inspection station for wafer handling in water |
High speed robot for wafers up to 200 mm |
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| Pre-aligner and bar code reader |
Twin scanner with two transducers |
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